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Proceedings Paper

Current developments on optical asphere and freeform metrology
Author(s): S. Mühlig; J. Siepmann; M. Lotz; A. Wiegmann; G. Blobel; S. Mika; A. Beutler; U. Nehse
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Paper Abstract

Two techniques for the measurement of aspheres as well as freeforms are presented. The first method, the tilted wave interferometer, is a full aperture interferometric measurement method without any moving parts during the measurement. The second method applies an optical single point sensor in conjunction with two translational and one rotational axes. Both techniques are compared by measuring a selected asphere and a special freeform surface. Differences between both measurement principles are discussed.

Paper Details

Date Published: 24 September 2015
PDF: 7 pages
Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 962812 (24 September 2015); doi: 10.1117/12.2191247
Show Author Affiliations
S. Mühlig, Mahr GmbH (Germany)
J. Siepmann, Mahr GmbH (Germany)
M. Lotz, Mahr GmbH (Germany)
A. Wiegmann, Mahr GmbH (Germany)
Physikalisch-Technische Bundesanstalt (Germany)
G. Blobel, Physikalisch-Technische Bundesanstalt (Germany)
S. Mika, Mahr GmbH (Germany)
A. Beutler, Mahr GmbH (Germany)
U. Nehse, Mahr GmbH (Germany)

Published in SPIE Proceedings Vol. 9628:
Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
Angela Duparré; Roland Geyl, Editor(s)

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