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Proceedings Paper

Traceability in interferometric form metrology
Author(s): M. Schulz; G. Blobel; I. Fortmeier; M. Stavridis; C. Elster
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Paper Abstract

The concept of traceability is presented for the interferometric form measurement of optical surfaces. The calibration chain for interferometric flatness measurement is evaluated in detail, showing that only a few influence quantities are significant. For spherical surfaces, the complexity increases as the measurement separates into sphericity and radius measurement. Traceability in asphere metrology is much more complex, and some aspects are discussed in terms of the example of the Tilted-Wave Interferometer concept.

Paper Details

Date Published: 22 June 2015
PDF: 9 pages
Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95251F (22 June 2015); doi: 10.1117/12.2191136
Show Author Affiliations
M. Schulz, Physikalisch-Technische Bundesanstalt (Germany)
G. Blobel, Physikalisch-Technische Bundesanstalt (Germany)
I. Fortmeier, Physikalisch-Technische Bundesanstalt (Germany)
M. Stavridis, Physikalisch-Technische Bundesanstalt (Germany)
C. Elster, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 9525:
Optical Measurement Systems for Industrial Inspection IX
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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