Scattermeter II is the second generation device designed and built at The Institute of Physical Engineering, Faculty of Mechanical Engineering, Brno University of Technology. This device has been designed for measuring the angular distribution of the intensity of electromagnetic radiation scattered from a surface of a solid. In this paper, the basic scheme of Scattermeter II and measuring principles with it are described. The results achieved in electromagnetic radiation scattering from surfaces of selected samples of single crystalline silicon wafers used in solar cells are also presented.

Date Published: 24 September 2015
PDF: 8 pages
Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 96280P (24 September 2015); doi: 10.1117/12.2190779

Published in SPIE Proceedings Vol. 9628:
Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
Angela Duparré; Roland Geyl, Editor(s)