This paper reports a new silica fiber-tip Fabry-Perot interferometer with thin film and large surface area characteristic for high pressure and vacuum degree detection simultaneously, which is fabricated by etching a flat fiber tip into concave surface firstly, with subsequent arc jointing the concave fiber into a inline Fabry-Perot cavity, then drawing one surface of the F-P cavity into several micrometers scale by arc discharge and finally etching the surface into sub-micrometer scale integrally. As the silica fiber-tip Fabry-Perot interferometer film thickness could be tailored very thinly by HF acid solution, plus the surface area of thin film could be expanded during the chemical etching process, the variation of the bubble cavity length is very sensitive to the inner/outer pressure difference of the fiber-tip Fabry-Perot interferometer. Experimental result shows an high sensitivity of 780nm/MPa is feasible. Such configuration has the advantages of lowcost, ease of fabrication and compact size, which make it a promising candidate for pressure and vacuum measurement.

Date Published: 1 July 2015
PDF: 4 pages
Proc. SPIE 9655, Fifth Asia-Pacific Optical Sensors Conference, 965517 (1 July 2015); doi: 10.1117/12.2184402

Published in SPIE Proceedings Vol. 9655:
Fifth Asia-Pacific Optical Sensors Conference
Byoungho Lee; Sang-Bae Lee; Yunjiang Rao, Editor(s)