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Proceedings Paper

Investigation vignetting beams in optoelectronic autocollimation angle measurement system
Author(s): Igor Konyakhin; Aiganym M. Sakhariyanova; Andrey Smekhov
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Paper Abstract

Autocollimation systems are widely used to measure angular values, in particular, angular deformations in the critical points of large objects, angles of optical components, and for controlling the straightness and parallelism. Autocollimator measures the rotation angle of the mirror as the sensitive element at angular deformation point with a potential accuracy up to 0.005 ". In fact, the error may significantly exceed the specified value because of systematic error existence, one of which main components is the error due to vignetting of working beam. The reason of vignetting error is changing of irradiance distribution of the image on the autocollimator analyzer due to cutting of a bundle of optical beams at a mirror deviation in case of angular deformation. On the basis of a computer simulation image model was investigated the influence of vignetting error and was found compensation algorithm of this error

Paper Details

Date Published: 21 June 2015
PDF: 7 pages
Proc. SPIE 9526, Modeling Aspects in Optical Metrology V, 95260H (21 June 2015); doi: 10.1117/12.2184250
Show Author Affiliations
Igor Konyakhin, ITMO Univ. (Russian Federation)
Aiganym M. Sakhariyanova, ITMO Univ. (Russian Federation)
Andrey Smekhov, ITMO Univ. (Russian Federation)

Published in SPIE Proceedings Vol. 9526:
Modeling Aspects in Optical Metrology V
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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