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Proceedings Paper

Is there any significant correlation between roughness and scattering near the Rayleigh limit?
Author(s): Hendrik Rothe; Andre Kasper
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Paper Abstract

Near or even beyond the Rayleigh-limit it is not possible to compute the surface PSD analytically. Since stray light measurements are an affordable approach for quality control in industry it has to be investigated, in which case they can be applied. Therefore a statistical method is proposed to determine, whether there is a significant correlation between roughness and scattering, or not. The method is proposed to determine, whether there is a significant correlation between roughness and scattering, or not. The method is tested with a newly developed rugged stray light sensor, several samples, and comparative measurements with an optical profiler.

Paper Details

Date Published: 1 September 1995
PDF: 7 pages
Proc. SPIE 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries, (1 September 1995); doi: 10.1117/12.218333
Show Author Affiliations
Hendrik Rothe, Federal Armed Forces Univ. (Germany)
Andre Kasper, Federal Armed Forces Univ. (Germany)


Published in SPIE Proceedings Vol. 2541:
Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries
John C. Stover, Editor(s)

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