In order to solve the problem of noncontact, wireless and nonmagnetic displacement sensing with nanometer resolution within critical limited space for ultraprecision displacement monitoring in the Joule balance device, a novel wireless digital capacitive displacement sensor (WDCDS) is proposed. The WDCDS is fabricated with brass and other nonmagnetic material and powered with a small battery inside, a small integrated circuit is assembled inside for converting and processing of capacitive signal, and low power Bluetooth is used for wireless signal transmission and communication. Experimental results show that the WDCDS proposed has a resolution of better than 1nm and a nonlinearity of 0.077%, therefore it is a delicate design for ultraprecision noncontact displacement monitoring in the Joule balance device, meeting the demand for properties of wireless, nonmagnetic and miniaturized size.

Date Published: 6 March 2015
PDF: 7 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 944659 (6 March 2015); doi: 10.1117/12.2183158

Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)