Diffraction efficiency of grating, created by hot imprint process on the surface of polycarbonate is one of the parameters, which determines the quality of microstructure. Microstructures are replicated by using hot imprint process with and without high frequency excitation and during the quality investigation, diffraction efficiencies were measured on purpose to find microstructure of best possible optical quality, as well determine whether high frequency excitation and other process parameters during the process affect this parameter. Process parameters include: temperature, excitation frequency, force of mechanical load and duration of hot imprint process, the purpose is to determine the collection of parameters, which influences the diffraction efficiency most positively. The novel vibro active pad is proposed for microstructures replication. The main dynamical characteristics of the vibropad are presented in the paper.

Date Published: 21 May 2015
PDF: 9 pages
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951722 (21 May 2015); doi: 10.1117/12.2182563

Published in SPIE Proceedings Vol. 9517:
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
José Luis Sánchez-Rojas; Riccardo Brama, Editor(s)