The cogging force disturbance of linear motor is one of the main factors affecting the positioning accuracy of ultraprecision moving platform. And this drawback could not be completely overcome by improving the design of motor body, such as location modification of permanent magnet array, or optimization design of the shape of teeth-slot. So the active compensation algorithms become prevalent in cogging force rejection area. This paper proposed a control structure based on internal mode principle to attenuate the cogging force of linear motor which deteriorated the accuracy of position, and this structure could make tracking and anti-disturbing performance of close-loop designed respectively. In the first place, the cogging force was seen as the intrinsic property of linear motor and its model constituting controlled object with motor ontology model was obtained by data driven recursive identification method. Then, a control structure was designed to accommodate tracking and anti-interference ability separately by using internal model principle. Finally, the proposed method was verified in a long stroke moving platform driven by linear motor. The experiment results show that, by employing this control strategy, the positioning error caused by cogging force was decreased by 70%.

Date Published: 6 March 2015
PDF: 6 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94464Y (6 March 2015); doi: 10.1117/12.2182395

Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)