Share Email Print

Proceedings Paper

Research on PID controller with input shaping algorithm for linear motor
Author(s): Yang Liu; Yue Dong; Wenchao Fan; Zhenxian Fu
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

The reticle stage of lithography is a high precision servo motion platform, which requires using macro movement of linear motor and micro movement of voice coil motor to realize an nm-level positioning precision and tracking. In order to increase the control effect and response speed of macro movement linear motor of reticle stage of lithography, the paper presents an efficient control for linear motor. The method use input shaping technique with Proportional Integral Derivative (PID) controller to realize the high position precision in small stetting time. In the paper we firstly build the linear motor mathematical modeling which is end to velocity loop or position loop. so that we mainly focus on the tracking of speed signal. Then a PID controller is introduced in the system, which is high frequency used in industrial control. Finally, as the need of high positioning precision and small stetting time, we apply input shaping algorithm to solve the problem. The simulation of the system is performed by using MATLAB/Simulation. The evaluation of the method is the performance of input tracking capability.

Paper Details

Date Published: 6 March 2015
PDF: 6 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94464W (6 March 2015); doi: 10.1117/12.2182387
Show Author Affiliations
Yang Liu, Harbin Institute of Technology (China)
Yue Dong, Harbin Institute of Technology (China)
Wenchao Fan, Harbin Institute of Technology (China)
Zhenxian Fu, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?