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Proceedings Paper

An improved PSO algorithm and its application on model identification of coarse-stage in lithography machine
Author(s): Yang Liu; Fazhi Liu; Kai Wei; Zhenxian Fu
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Paper Abstract

Lithography machine is a high-precision manufacturing equipment of electromechanical integration, involving precision machinery, precision control and measure, precision measurement and other subjects. PSO algorithm is easy to fall into local optimum, which has simple concepts and fast convergence. This paper proposes an improved PSO algorithm with adaptive parameters and boundary constraint, in ensuring accuracy of the algorithm optimization and fast convergence. Simulation results show that the methods have good applicability and stability for coarse-stage in lithpgraphy machine.

Paper Details

Date Published: 6 March 2015
PDF: 6 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94464U (6 March 2015); doi: 10.1117/12.2182382
Show Author Affiliations
Yang Liu, Harbin Institute of Technology (China)
Fazhi Liu, Harbin Institute of Technology (China)
Kai Wei, Harbin Institute of Technology (China)
Zhenxian Fu, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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