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Proceedings Paper

Characterization of nanoscale multilayer structures upon thermal annealing
Author(s): I. A. Makhotkin; A. Zameshin; R. W. E. van de Kruijs; A. Yakshin; F. Bijkerk
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Paper Abstract

Obtaining a high quality physical description of the layered structure of multilayer based optical coatings is an essential part of the optimization of their optical performance. Grazing incidence X-ray reflectivity (GIXR) is one of the most informative and easy-to-use non-destructive tools for the analysis of multilayer structures. The typical challenge of GIXR structural characterization is the reconstruction of the layered structure from fitting simulated data to experimental data. Here we present an example of the application of a newly developed, free-form, GIXR analysis to the characterization of heat induced structural changes in periodic La/B multilayers. This example shows that the developed algorithm is capable of reconstructing electron density profiles in cases where a classical non free-form approach generally fails.

Paper Details

Date Published: 12 May 2015
PDF: 4 pages
Proc. SPIE 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV, 95100V (12 May 2015); doi: 10.1117/12.2182256
Show Author Affiliations
I. A. Makhotkin, Univ. Twente (Netherlands)
A. Zameshin, Univ. Twente (Netherlands)
R. W. E. van de Kruijs, Univ. Twente (Netherlands)
A. Yakshin, Univ. Twente (Netherlands)
F. Bijkerk, Univ. Twente (Netherlands)

Published in SPIE Proceedings Vol. 9510:
EUV and X-ray Optics: Synergy between Laboratory and Space IV
René Hudec; Ladislav Pina, Editor(s)

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