As a widely used open-architecture computer bus ,VME bus is increasingly applied in military, aerospace, transportation and other large-scale control systems. Lithography, a very delicate and complicated integrated circuit manufacturing equipment, uses many circuit boards with VME interface in its control system, including one single-board computer, many movement control boards and one data acquisition board. This paper designs communication modules which include VME bus module and VME user-defined bus module for multi-boards in Lithography control system. VME bus module is designed for the communication between the single-board computer and movement control boards and VME user-defined bus is designed for the communication between movement control boards and data acquisition board. The experimental results demonstrate its effectiveness.

Date Published: 6 March 2015
PDF: 6 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94464O (6 March 2015); doi: 10.1117/12.2182254

Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)