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Proceedings Paper

Communication design for multi-boards based on VME bus
Author(s): Yang Liu; Fazhi Song; Kai Wei; Zhenxian Fu
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Paper Abstract

As a widely used open-architecture computer bus ,VME bus is increasingly applied in military, aerospace, transportation and other large-scale control systems. Lithography, a very delicate and complicated integrated circuit manufacturing equipment, uses many circuit boards with VME interface in its control system, including one single-board computer, many movement control boards and one data acquisition board. This paper designs communication modules which include VME bus module and VME user-defined bus module for multi-boards in Lithography control system. VME bus module is designed for the communication between the single-board computer and movement control boards and VME user-defined bus is designed for the communication between movement control boards and data acquisition board. The experimental results demonstrate its effectiveness.

Paper Details

Date Published: 6 March 2015
PDF: 6 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94464O (6 March 2015); doi: 10.1117/12.2182254
Show Author Affiliations
Yang Liu, Harbin Institute of Technology (China)
Fazhi Song, Harbin Institute of Technology (China)
Kai Wei, Harbin Institute of Technology (China)
Zhenxian Fu, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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