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Proceedings Paper

Effects of dynamic characters of the macro-micro fast coupling system in long stroke system
Author(s): Jianwei Wu; Yong Yuan; Jiwen Cui
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Paper Abstract

Macro-micro fast coupling system of dual-stage is used for the detachment and coupling of the macro-motion system and the wafer-stage. When the macro-motion system couples with the wafer-stage, the wafer-stage is driven by macro-motor to achieve long stroke motion. In this paper, the bottom air bearings of wafer stage are analyzed when the driving force of macro motor shifts the center of mass of wafer stage in Z direction. The X, Y, Z stiffness of the coupling system are obtained by using ANSYS.

Paper Details

Date Published: 6 March 2015
PDF: 8 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 944641 (6 March 2015); doi: 10.1117/12.2181599
Show Author Affiliations
Jianwei Wu, Harbin Institute of Technology (China)
Yong Yuan, Harbin Institute of Technology (China)
Jiwen Cui, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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