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Proceedings Paper

Elimination of Abbe error method of large-scale laser comparator
Author(s): Jianshuang Li; Manshan Zhang; Mingzhao He; Dongjing Miao; Xiangrui Deng; Lianfu Li
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Paper Abstract

Abbe error is the inherent systematic error in all large-scale laser comparators because the standard laser axis is not in line with measured optical axis. Any angular error of the moving platform will result in the offset from the measured optical axis to the standard laser axis. This paper describes to an algorithm which could be used to calculate the displacement of an equivalent standard laser interferometer and to eliminate an Abbe error. The algorithm could also be used to reduce the Abbe error of a large-scale laser comparator. Experimental results indicated that the uncertainty of displacement measurement due to Abbe error could be effectively reduced when the position error of the measured optical axis was taken into account.

Paper Details

Date Published: 6 March 2015
PDF: 9 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94463V (6 March 2015); doi: 10.1117/12.2181500
Show Author Affiliations
Jianshuang Li, National Institute of Metrology (China)
Tianjin Univ. (China)
Manshan Zhang, Beijing Institute of Metrology (China)
Mingzhao He, National Institute of Metrology (China)
Dongjing Miao, National Institute of Metrology (China)
Xiangrui Deng, National Institute of Metrology (China)
Lianfu Li, National Institute of Metrology (China)

Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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