Paper Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 9276, including the Title Page, Copyright information, Table of Contents, Introduction (if any), and Conference Committee listing.
Paper Details
Date Published: 18 December 2014
PDF: 16 pages
Proc. SPIE 9276, Optical Metrology and Inspection for Industrial Applications III, 927601 (18 December 2014); doi: 10.1117/12.2181473
Published in SPIE Proceedings Vol. 9276:
Optical Metrology and Inspection for Industrial Applications III
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)
PDF: 16 pages
Proc. SPIE 9276, Optical Metrology and Inspection for Industrial Applications III, 927601 (18 December 2014); doi: 10.1117/12.2181473
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Published in SPIE Proceedings Vol. 9276:
Optical Metrology and Inspection for Industrial Applications III
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)
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