A large-scale laser interferometric measurement standard device was designed and developed to improve the quantity transmission and calibration capabilities for linear measuring tools and large-scale high precision measurement instruments such as laser trackers, laser scanners and electronic total stations, etc. It consisted of an 80 meters granite guiding rail system, a length measuring system composed of three interferometers, a coarse-fine composite motion platform, environmental parameter (air pressure, temperature and humidity) automatic measuring system, and an image aiming system. The uncertainty of the standard device was analyzed, and a comparative experiment was made to determine the calibration capability of the built standard device. Experiment result indicated that the measurement uncertainty of this standard device to calibrate the other interferometers was better than 0.1μm + 1.0 × 10^-7 L(k = 2).

Date Published: 6 March 2015
PDF: 9 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94463I (6 March 2015); doi: 10.1117/12.2181381

Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)