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Proceedings Paper

Development of ultra-precision centering and leveling turntable using aerostatic bearing technology
Author(s): Maosheng Hou; Yanrong Tian; Lin Ji; Longxiao Wang; Jiaqi Liu; Weiqian Zhao
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Paper Abstract

To perform the ultra-precision centering and leveling operation of large surface under test in optical and mechanical precision measurements, a novel automatic centering and leveling turntable based on the aerostatic bearing technology is developed. In the functional module of centering, a planar aerostatic bearing and two micro-displacement actuators are utilized to achieve centering operation, and in the leveling functional module, a spherical aerostatic bearing, two microdisplacement actuators and a spring pivot are employed to realize the leveling operation. In the paper, the mathematical models of centering and leveling operation are obtained using coordinate transformation, and coupling between the centering and leveling operation is also analyzed. Furthermore, by using distance-measuring interferometer and autocollimator, the resolutions of centering and leveling operation are measured. Finally, errors of the centering and leveling operation are analyzed and the performance evaluation of the turntable is given. The experimental results show that, with 50Kg load, the leveling operation resolution is better than 1.2″; leveling operation range is ±1°; the centering operation resolution is better than 0.05μm; centering operation range is about ±5mm. The developed turntable can satisfy the requirements of ultra-precision, high resolution, wide range, frictionless, high load stiffness, stabilization and small driving force.

Paper Details

Date Published: 6 March 2015
PDF: 11 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94463A (6 March 2015); doi: 10.1117/12.2181345
Show Author Affiliations
Maosheng Hou, Beijing Institute of Technology (China)
Yanrong Tian, Beijing Institute of Technology (China)
Lin Ji, Beijing Institute of Technology (China)
Longxiao Wang, Beijing Institute of Technology (China)
Jiaqi Liu, Beijing Institute of Technology (China)
Weiqian Zhao, Beijing Institute of Technology (China)

Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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