For many applications of MEMS actuators a well-defined trajectory of the movable device component is crucial when using a simple and inexpensive open-loop controller. We have applied to quasi-statically actuated electromagnetic MEMS mirrors the control technique called "input shaping", which is widely used for systems at the macro-scale and to a lesser extent also to systems at the micro-scale. We derive the impulse response of a filter which suppresses the excitation of undesired resonant modes and present simulation and measurement results of the oscillation-free linear MEMS mirror movement. The robustness of different input shaping filter types with respect to errors in the estimation of the system parameters, i.e., resonance frequency and damping ratio, is analyzed.

Date Published: 21 May 2015
PDF: 7 pages
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170J (21 May 2015); doi: 10.1117/12.2181241

Published in SPIE Proceedings Vol. 9517:
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
José Luis Sánchez-Rojas; Riccardo Brama, Editor(s)