A novel in-plane and out-of-plane deformation simultaneous measurement method using only two speckle patterns grabbed before and after deformation of an object with rough surfaces has been proposed. In the new optical system, a phenomenon of in-plane and out-of-plane deformation can be simultaneously recorded by only one camera by using the multi-recording method of speckle patterns. However, it is thought that there are some problems concerning measuring accuracy, because plural dimensional data has to be grabbed by single camera. The influence of factor of each error source to measuring accuracy of the method is investigated by using experimental results.

Date Published: 14 May 2015
PDF: 8 pages
Proc. SPIE 9489, Dimensional Optical Metrology and Inspection for Practical Applications IV, 94890F (14 May 2015); doi: 10.1117/12.2181198

Published in SPIE Proceedings Vol. 9489:
Dimensional Optical Metrology and Inspection for Practical Applications IV
Kevin G. Harding; Toru Yoshizawa, Editor(s)