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Proceedings Paper

Laser confocal measurement system for curvature radius of lenses based on grating ruler
Author(s): Jiwei Tian; Yun Wang; Nan Zhou; Weirui Zhao; Weiqian Zhao
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Paper Abstract

In the modern optical measurement field, the radius of curvature (ROC) is one of the fundamental parameters of optical lens. Its measurement accuracy directly affects the other optical parameters, such as focal length, aberration and so on, which significantly affect the overall performance of the optical system. To meet the demand of measurement instruments for radius of curvature (ROC) with high accuracy in the market, we develop a laser confocal radius measurement system with grating ruler. The system uses the peak point of the confocal intensity curve to precisely identify the cat-eye and confocal positions and then measure the distance between these two positions by using the grating ruler, thereby achieving the high-precision measurement for the ROC. The system has advantages of high focusing sensitivity and anti-environment disturbance ability. And the preliminary theoretical analysis and experiments show that the measuring repeatability can be up to 0.8 um, which can provide an effective way for the accurate measurement of ROC.

Paper Details

Date Published: 6 March 2015
PDF: 7 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94462T (6 March 2015); doi: 10.1117/12.2181193
Show Author Affiliations
Jiwei Tian, Beijing Institute of Technology (China)
Yun Wang, Beijing Institute of Technology (China)
Nan Zhou, Beijing Institute of Technology (China)
Weirui Zhao, Beijing Institute of Technology (China)
Weiqian Zhao, Beijing Institute of Technology (China)

Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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