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Proceedings Paper

Signal processing for single grating displacement measurement based on 3×3 coupler
Author(s): Chunhua Wei; Shuhua Yan; Cunbao Lin; Guochao Wang
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Paper Abstract

We present a compact displacement measurement system based on single grating and 3×3 coupler, possessing the capability of large range and nanometer precision. With the introduction of 3×3 coupler for phase shift in interference signal, the present scheme has the advantages of simple structure, convenient alignment, and insensitivity to air turbulence, resulting in high robustness. We accordingly developed an efficient and precision signal processing method for phase demodulation on a digital signal processing, adapting to characteristics of outputs in 3×3 coupler, achieving a high-powered subdivision of the interference phase. It was validated that the phase precision was about 1° even when phase and amplitude errors were added to interference signals in the simulation, which corresponded to a displacement precision of about 3nm.

Paper Details

Date Published: 6 March 2015
PDF: 7 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 944625 (6 March 2015); doi: 10.1117/12.2180922
Show Author Affiliations
Chunhua Wei, National Univ. of Defense Technology (China)
Shuhua Yan, National Univ. of Defense Technology (China)
Cunbao Lin, National Univ. of Defense Technology (China)
Guochao Wang, National Univ. of Defense Technology (China)


Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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