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Proceedings Paper

Surface profile measurement of microstructures with steep slopes by sample-titling strategy
Author(s): Bin Xu; Wei Chen; Yubo Huang; Kang Song; Shiping Zhao
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Paper Abstract

A sample-titling strategy is proposed for the correction of the relative slope of microstructures and the scanning stylus during the surface profile measurement of microstructures with steep slopes. The correct surface profile of a measurement sample was reconstructed by data fusion of the probe trace, rotation angles of a sample and the motion of the scanner. Slope prediction and scanner control methods were also proposed to determine the rotation angle of a sample. Simulation was performed using a stylus with a tip of 2 μm and included angle of 90 degrees, and a trapezoid microstructure with a slope of 60 degrees to verify the feasibility of the proposed method. The measurement error of the proposed method is 0.31 μm while that of an existing scanning method is 4.50 μm in the simulation. Simulation results indicated that the proposed method could be used to increase the maximum detectable slope of a stylus profiling system and to reduce slope measurement errors as well.

Paper Details

Date Published: 6 March 2015
PDF: 7 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 944623 (6 March 2015); doi: 10.1117/12.2180891
Show Author Affiliations
Bin Xu, Sichuan Univ. (China)
Wei Chen, Sichuan Univ. (China)
Yubo Huang, Sichuan Univ. (China)
Kang Song, Sichuan Univ. (China)
Shiping Zhao, Sichuan Univ. (China)

Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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