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Proceedings Paper

Optimal design of a touch trigger probe
Author(s): Rui-Jun Li; Meng Xiang; Kuang-Chao Fan; Hao Zhou; Jian Feng
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Paper Abstract

A tungsten stylus with a ruby ball tip was screwed into a floating plate, which was supported by four leaf springs. The displacement of the tip caused by the contact force in 3D could be transferred into the tilt or vertical displacement of a plane mirror mounted on the floating plate. A quadrant photo detector (QPD) based two dimensional angle sensor was used to detect the tilt or the vertical displacement of the plane mirror. The structural parameters of the probe are optimized for equal sensitivity and equal stiffness in a displacement range of ±5 μm, and a restricted horizontal size of less than 40 mm. Simulation results indicated that the stiffness was less than 0.6 mN/μm and equal in 3D. Experimental results indicated that the probe could be used to achieve a resolution of 1 nm.

Paper Details

Date Published: 6 March 2015
PDF: 7 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94461Z (6 March 2015); doi: 10.1117/12.2180866
Show Author Affiliations
Rui-Jun Li, Hefei Univ. of Technology (China)
Anhui Electrical Engineering Professional Technique College (China)
Meng Xiang, Hefei Univ. of Technology (China)
Kuang-Chao Fan, Hefei Univ. of Technology (China)
National Taiwan Univ. (Taiwan)
Hao Zhou, Hefei Univ. of Technology (China)
Jian Feng, Hefei Univ. of Technology (China)

Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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