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Proceedings Paper

Absolute distance measurement by spectral interferometry through wavelet transform with frequency comb
Author(s): Hanzhong Wu; Fumin Zhang; Xinghua Qu
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Paper Abstract

Wavelet transform (WT) was exploited to measure distances based on spectrum interferometry. Complex Morlet wavelet was used as the mother wavelet to obtain the amplitude graph and phase graph simultaneously, and the latter showed the wrapped phase in fact. The distances were measured numerically and experimentally, and each distance for ten times. Experimental results indicated that the distance could be obtained uniquely using wavelet transform, and the reproducibility deviation was 77.7 nm when the measured distance is about 1 mm.

Paper Details

Date Published: 6 March 2015
PDF: 6 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94461O (6 March 2015); doi: 10.1117/12.2180834
Show Author Affiliations
Hanzhong Wu, Tianjin Univ. (China)
Fumin Zhang, Tianjin Univ. (China)
Xinghua Qu, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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