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Proceedings Paper

Determination of the nucleation region of Si particles produced by pulsed-laser deposition in Monte Carlo simulation
Author(s): Aili Qin; Lizhi Chu; Zechao Deng; Xiaolong Zhang; Yinglong Wang
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Paper Abstract

The nucleation and growth of Si nanoparticle produced by pulsed laser ablation in helium gas ambient is investigated via direct simulation Monte Carlo method with a real physical scale of target-substrate configuration. The nucleation area is important for the formation of Si nanoparticles, and the average size and size distribution of Si nanoparticles formed in this region depend on its range. The narrower the nucleation area and, therefore, the less the maximum times of collisions between Si atoms in the region, the smaller and the more uniform the Si nanoparticles. A nucleation and growth process is clearly observed. It is shown that the nucleation region and the nucleation growth internal is changing with time. The ambient gas pressure is important to nucleation region. The suitable pressure range under certain conditions is given and our simulated results are approximately in agreement with the previous experimental data.

Paper Details

Date Published: 4 May 2015
PDF: 6 pages
Proc. SPIE 9543, Third International Symposium on Laser Interaction with Matter, 95430T (4 May 2015); doi: 10.1117/12.2180746
Show Author Affiliations
Aili Qin, Hebei Univ. (China)
Hebei Univ. of Engineering (China)
Lizhi Chu, Hebei Univ. (China)
Zechao Deng, Hebei Univ. (China)
Xiaolong Zhang, Hebei Univ. (China)
Yinglong Wang, Hebei Univ. (China)

Published in SPIE Proceedings Vol. 9543:
Third International Symposium on Laser Interaction with Matter
Yury M. Andreev; Zunqi Lin III; Xiaowu Ni; Xisheng Ye, Editor(s)

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