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Proceedings Paper

Surface treatment of polyimide film for metal magnetron deposition in vacuum
Author(s): V. Petrov; D. Vertyanov; S. Timoshenkov; V. Nikolaev
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Paper Abstract

This paper brings forward a solution for acquisition of good quality metallization layers on the polyimide substrate by magnetron deposition in vacuum environment. Different film type structures have been analyzed after refining and activation surface treatment operations. Positive effect was shown after the application of polyimide lacquer for surface dielectric film planarization and for structural defects elimination.

Paper Details

Date Published: 18 December 2014
PDF: 7 pages
Proc. SPIE 9440, International Conference on Micro- and Nano-Electronics 2014, 94400A (18 December 2014); doi: 10.1117/12.2180420
Show Author Affiliations
V. Petrov, National Research Univ. of Electronic Technology (Russian Federation)
D. Vertyanov, National Research Univ. of Electronic Technology (Russian Federation)
S. Timoshenkov, National Research Univ. of Electronic Technology (Russian Federation)
V. Nikolaev, National Research Univ. of Electronic Technology (Russian Federation)


Published in SPIE Proceedings Vol. 9440:
International Conference on Micro- and Nano-Electronics 2014
Alexander A. Orlikovsky, Editor(s)

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