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Proceedings Paper

The effect of sensor temperature and MOx layer thickness on the sensitivity of SnO2- and WO3-based chemiresistive sensors to ethylene gas
Author(s): Matic Krivec; Raimund Leitner; Roland Waldner; Johanna Gostner; Florian Überall
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Paper Abstract

Two types of MOx sensor structures, SnO2 and WO3, of different thicknesses were synthesized on top of the interdigitated Au electrodes and used for the measurements of the ethylene gas. The SEM micrographs revealed inhomogeneities of the WO3 layer and the presence of cracks on the edges of Au electrodes which correlates with the lack of reproducibility of the WO3 sensors. Both sensor structures showed a significant sensitivity to ethylene gas: the sensitivities of both MOx-types were higher at higher temperatures which was more evident in the case of SnO2 structure. The SnO2 layer had approximately 5-times higher sensitivity than the WO3 sensor of the same thickness. The saturation (T10) and desaturation (T90) times were shorter for WO3 sensors at lower temperatures while SnO2 was saturated and desaturated faster at higher temperatures. Sensors with thinner active layer possessed higher sensitivities and shorter T10 and T90 times.

Paper Details

Date Published: 21 May 2015
PDF: 8 pages
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951713 (21 May 2015); doi: 10.1117/12.2179235
Show Author Affiliations
Matic Krivec, Carinthian Tech Research AG (Austria)
Raimund Leitner, Carinthian Tech Research AG (Austria)
Roland Waldner, Philips Consumer Lifestyle Klagenfurt (Austria)
Johanna Gostner, Medizinische Univ. Innsbruck (Austria)
Florian Überall, Medizinische Univ. Innsbruck (Austria)

Published in SPIE Proceedings Vol. 9517:
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
José Luis Sánchez-Rojas; Riccardo Brama, Editor(s)

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