MEMS-based optical microspectrometers are typically composed of MEMS devices for operation as dispersive element or as tunable resonator within an optical system. CMOS-compatible MEMS technologies enable on-chip integration of the MEMS optical components, detector and readout circuits. The actual realization and exploitation of this on-chip functional integration of the entire microspectrometer imposes several challenges. The state-of-the-art and some of the technology and design challenges will be outlined, followed by an introduction to some of the trends and upcoming application of high potential.

Date Published: 21 May 2015
PDF: 12 pages
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170I (21 May 2015); doi: 10.1117/12.2179059

Published in SPIE Proceedings Vol. 9517:
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
José Luis Sánchez-Rojas; Riccardo Brama, Editor(s)