In this article, the relation between position accuracy and the number of simultaneously measured values, such as coordinates, has been analyzed. Based on this, a conceptual layout of MEMS devices (microsensors) for multidimensional position monitoring comprising a single anchored and a single actuated part has been developed. Both parts are connected with a plurality of micromechanical flexures, and each flexure includes position detecting cantilevers. Microsensors having detecting cantilevers oriented in X and Y direction have been designed and prototyped. Experimentally measured results at characterization of 1D, 2D and 3D position microsensors are reported as well. Exploiting different flexure layouts, a travel range between 50μm and 1.8mm and sensors’ sensitivity in the range between 30μV/μm and 5mV/μm@ 1V DC supply voltage have been demonstrated. A method for accurate calculation of all three Cartesian coordinates, based on measurement of at least three microsensors’ signals has also been described. The analyses of experimental results prove the capability of position monitoring with ppm-(part per million) accuracy. The technology for fabrication of MEMS devices with sidewall embedded piezoresistors removes restrictions in strong improvement of their usability for position sensing with a high accuracy. The present study is, also a part of a common strategy for developing a novel MEMS-based platform for simultaneous accurate measurement of various physical values when they are transduced to a change of position.

Date Published: 21 May 2015
PDF: 11 pages
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170X (21 May 2015); doi: 10.1117/12.2178712

Published in SPIE Proceedings Vol. 9517:
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
José Luis Sánchez-Rojas; Riccardo Brama, Editor(s)