For three decades or so, microfluidics continued to receive attention. This increasing interest is primarily driven by applications. Example applications range from sensors and actuators, to Micro Electro Mechanical Systems, biotechnology and chemistry. In our laboratory, we have been developing microfluidics primarily for spectrochemical applications, for example, for fabrication of postage stamp size microplasma devices and for sample preparation and processing. The main focus of this paper is to describe fabrication technology developed in our laboratories for fabrication of microfluidics on (relatively expensive) crystalline Silicon wafers and on inexpensive glass chips.

Date Published: 13 May 2015
PDF: 6 pages
Proc. SPIE 9486, Advanced Environmental, Chemical, and Biological Sensing Technologies XII, 94860N (13 May 2015); doi: 10.1117/12.2177513

Published in SPIE Proceedings Vol. 9486:
Advanced Environmental, Chemical, and Biological Sensing Technologies XII
Tuan Vo-Dinh; Robert A. Lieberman; Günter G. Gauglitz, Editor(s)