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Proceedings Paper

Enhanced performance of VOx-based bolometer using patterned gold black absorber
Author(s): Evan M. Smith; Deep Panjwani; James Ginn; Andrew Warren; Christopher Long; Pedro Figuieredo; Christian Smith; Joshua Perlstein; Nick Walter; Carol Hirschmugl; Robert E. Peale; David J. Shelton
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Paper Abstract

Patterned highly absorbing gold black film has been selectively deposited on the active surfaces of a vanadium-oxide-based infrared bolometer array. Patterning by metal lift-off relies on protection of the fragile gold black with an evaporated oxide, which preserves gold black’s near unity absorption. This patterned gold black also survives the dry-etch removal of the sacrificial polyimide used to fabricate the air-bridge bolometers. Infrared responsivity is substantially improved by the gold black coating without significantly increasing noise. The increase in the time constant caused by the additional mass of gold black is a modest 14%.

Paper Details

Date Published: 8 June 2015
PDF: 7 pages
Proc. SPIE 9451, Infrared Technology and Applications XLI, 94511I (8 June 2015); doi: 10.1117/12.2177401
Show Author Affiliations
Evan M. Smith, Univ. of Central Florida (United States)
Plasmonics, Inc. (United States)
Deep Panjwani, Univ. of Central Florida (United States)
James Ginn, Plasmonics, Inc. (United States)
Andrew Warren, Plasmonics, Inc. (United States)
Christopher Long, Plasmonics, Inc. (United States)
Pedro Figuieredo, Univ. of Central Florida (United States)
Plasmonics, Inc. (United States)
Christian Smith, Univ. of Central Florida (United States)
Joshua Perlstein, Plasmonics, Inc. (United States)
Nick Walter, Univ. of Wisconsin-Milwaukee (United States)
Carol Hirschmugl, Univ. of Wisconsin-Milwaukee (United States)
Robert E. Peale, Univ. of Central Florida (United States)
David J. Shelton, Plasmonics, Inc. (United States)

Published in SPIE Proceedings Vol. 9451:
Infrared Technology and Applications XLI
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson; Paul R. Norton, Editor(s)

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