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Proceedings Paper

Technology, characterization, and applications of adaptive mirrors fabricated with IC-compatible micromachining
Author(s): Gleb V. Vdovin; Simon Middelhoek; Marian Bartek; Pasqualina M. Sarro; Dimitri Solomatine
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Paper Abstract

Fabrication of electrostatically controlled membrane adaptive mirrors produced with IC- compatible micromachining is reported. Mirrors have rectangular reflective apertures with sizes varied from 1 by 1 mm up to 11 by 11 mm. The surface of the flexible mirror is formed by a free-suspended 0.5 micrometer-thick silicon nitride film coated with a thin reflective layer of aluminum. The rms deviation from plane for a mirror having one square centimeter aperture is 0.2 micrometer, mirrors with optical quality up to lambda/20 may be selected from batch. Up to sixteen mirrors can be fabricated on one four-inch silicon wafer. Optical figure of the reflective membrane is controlled by an array of 1...100 electrostatic actuators of arbitrary shape placed 20...100 micrometer beneath the reflecting membrane. Technology of fabrication is flexible enough to allow for fabrication of varifocal mirrors, multichannel adaptive mirrors, and spatial light modulators. These and some other applications are discussed in the report.

Paper Details

Date Published: 25 August 1995
PDF: 14 pages
Proc. SPIE 2534, Adaptive Optical Systems and Applications, (25 August 1995); doi: 10.1117/12.217730
Show Author Affiliations
Gleb V. Vdovin, Delft Univ. of Technology (Netherlands)
Simon Middelhoek, Delft Univ. of Technology (Netherlands)
Marian Bartek, Delft Univ. of Technology (Netherlands)
Pasqualina M. Sarro, DIMES (Netherlands)
Dimitri Solomatine, International Institute for Infrastructural Hydraulic and Environmental Engineering (Netherlands)

Published in SPIE Proceedings Vol. 2534:
Adaptive Optical Systems and Applications
Robert K. Tyson; Robert Q. Fugate, Editor(s)

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