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Proceedings Paper

Gas detection with microelectromechanical Fabry-Perot interferometer technology in cell phone
Author(s): Rami Mannila; Risto Hyypiö; Marko Korkalainen; Martti Blomberg; Hannu Kattelus; Anna Rissanen
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Paper Abstract

VTT Technical Research Centre of Finland has developed a miniaturized optical sensor for gas detection in a cell phone. The sensor is based on a microelectromechanical (MEMS) Fabry-Perot interferometer, which is a structure with two highly reflective surfaces separated by a tunable air gap. The MEMS FPI is a monolithic device, i.e. it is made entirely on one substrate in a batch process, without assembling separate pieces together. The gap is adjusted by moving the upper mirror with electrostatic force, so there are no actual moving parts.

VTT has designed and manufactured a MEMS FPI based carbon dioxide sensor demonstrator which is integrated to a cell phone shield cover. The demonstrator contains light source, gas cell, MEMS FPI, detector, control electronics and two coin cell batteries as a power source. It is connected to the cell phone by Bluetooth. By adjusting the wavelength range and customizing the MEMS FPI structure, it is possible to selectively sense multiple gases.

Paper Details

Date Published: 3 June 2015
PDF: 9 pages
Proc. SPIE 9482, Next-Generation Spectroscopic Technologies VIII, 94820P (3 June 2015); doi: 10.1117/12.2176923
Show Author Affiliations
Rami Mannila, VTT Technical Research Ctr. of Finland (Finland)
Risto Hyypiö, VTT Technical Research Ctr. of Finland (Finland)
Marko Korkalainen, VTT Technical Research Ctr. of Finland (Finland)
Martti Blomberg, VTT Memsfab (Finland)
Hannu Kattelus, VTT Memsfab (Finland)
Anna Rissanen, VTT Technical Research Ctr. of Finland (Finland)

Published in SPIE Proceedings Vol. 9482:
Next-Generation Spectroscopic Technologies VIII
Mark A. Druy; Richard A. Crocombe; David P. Bannon, Editor(s)

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