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Proceedings Paper

Polarization-selective uncooled infrared sensor using a one-dimensional plasmonic grating absorber
Author(s): Shinpei Ogawa; Yousuke Takagawa; Masafumi Kimata
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Paper Abstract

A polarization-selective uncooled infrared (IR) sensor has been developed based on a one-dimensional plasmonic grating absorber (1-D PGA). The 1-D PGA has an Au-based one-dimensional periodic grating structure, where photons can be manipulated by surface plasmon resonance. A microelectromechanical systems-based uncooled IR sensor was fabricated using the 1-D PGA with complementary metal oxide semiconductor (CMOS) and micromachining techniques. The 1-D PGA was formed with an Au layer sputtered on a grating pattered SiO2 layer. An Al layer was then introduced onto the backside of the 1-D PGA to reflect scattered light and prevent absorption at the SiO2 backside of the absorber. The responsivity could be selectively enhanced depending on the polarization and the grating direction, and an absorption wavelength longer than the surface period and broadband absorption were realized due to the effect of the resonance in the grating depth direction. The 1-D PGAs enable a detection wavelength longer than the period and broadbandpolarization- selectivity by control of the grating depth in addition to the period. The results obtained in this study will contribute to the advancement of polarimetric IR imaging.

Paper Details

Date Published: 4 June 2015
PDF: 6 pages
Proc. SPIE 9451, Infrared Technology and Applications XLI, 94511K (4 June 2015); doi: 10.1117/12.2176549
Show Author Affiliations
Shinpei Ogawa, Mitsubishi Electric Corp. (Japan)
Yousuke Takagawa, Ritsumeikan Univ. (Japan)
Masafumi Kimata, Ritsumeikan Univ. (Japan)

Published in SPIE Proceedings Vol. 9451:
Infrared Technology and Applications XLI
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson; Paul R. Norton, Editor(s)

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