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Proceedings Paper

3D form inspection of grinded optical surfaces by digital holography
Author(s): Pavel Psota; Vít Lédl; Petr Vojtíšek; Roman Doleček; Václav Kopecký
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Paper Abstract

Paper presents the method for shape measurement by digital holography based on wavelength contouring. The method employs multiple measurements from different illumination directions followed by stitching of the individual measurements by least square method. This approach is promising in measuring of steeper surface slopes more accurately

Paper Details

Date Published: 7 January 2015
PDF: 9 pages
Proc. SPIE 9442, Optics and Measurement Conference 2014, 944218 (7 January 2015); doi: 10.1117/12.2176005
Show Author Affiliations
Pavel Psota, Technical Univ. of Liberec (Czech Republic)
Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)
Vít Lédl, Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)
Petr Vojtíšek, Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)
Roman Doleček, Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)
Václav Kopecký, Technical Univ. of Liberec (Czech Republic)


Published in SPIE Proceedings Vol. 9442:
Optics and Measurement Conference 2014
Jana Kovačičinová; Tomáš Vít, Editor(s)

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