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Proceedings Paper

2D MEMS scanning LIDAR with sub-Nyquist sampling, set-up and functionality
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Paper Abstract

2D-MEMS scanners for the deflection of Laser light in two directions are used to illuminate a measurement volume within 40° in horizontal and vertical direction. This solid angle of about 0.02 is scanned by a 658nm Laser beam with a maximum repetition rate of 350MHz digital pulses with an intensity of about 50mW. Reflected light is detected through an objective by an APD with a bandwidth of 80MHz. The phase difference between the scanned Laser light and the light reflected from an object is analyzed by sub-Nyquist sampling allowing the calculation of its distance and velocity. Presently, the achieved accuracy of the system is between 5mm and 10mm and the measurement range is about 2m. The experimental set-up of the Lidar system is presented in detail and first measurements demonstrating the capability of the system are discussed.

Paper Details

Date Published: 22 May 2015
PDF: 10 pages
Proc. SPIE 9495, Three-Dimensional Imaging, Visualization, and Display 2015, 94950S (22 May 2015); doi: 10.1117/12.2175855
Show Author Affiliations
Joachim Janes, Fraunhofer Institute for Silicon Technology (Germany)
Thorsten Giese, Fraunhofer Institute for Silicon Technology (Germany)

Published in SPIE Proceedings Vol. 9495:
Three-Dimensional Imaging, Visualization, and Display 2015
Bahram Javidi; Jung-Young Son, Editor(s)

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