Share Email Print

Proceedings Paper

2D MEMS scanning for LIDAR with sub-Nyquist sampling, electronics, and measurement procedure
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Electrostatic driven 2D MEMS scanners resonantly oscillate in both axes leading to Lissajous trajectories of a digitally modulated laser beam reflected from the micro mirror. A solid angle of about 0.02 is scanned by a 658nm laser beam with a maximum repetition rate of 350MHz digital pulses. Reflected light is detected by an APD with a bandwidth of 80MHz. The phase difference between the scanned laser light and the light reflected from an obstacle is analyzed by sub-Nyquist sampling. The FPGA-based electronics and software for the evaluation of distance and velocity of objects within the scanning range are presented. Furthermore, the measures to optimize the Lidar accuracy of about 1mm and the dynamic range of up to 2m are examined. First measurements demonstrating the capability of the system and the evaluation algorithms are discussed.

Paper Details

Date Published: 22 May 2015
PDF: 12 pages
Proc. SPIE 9495, Three-Dimensional Imaging, Visualization, and Display 2015, 94950F (22 May 2015); doi: 10.1117/12.2175851
Show Author Affiliations
Thorsten Giese, Fraunhofer Institute for Silicon Technology (Germany)
Joachim Janes, Fraunhofer Institute for Silicon Technology (Germany)

Published in SPIE Proceedings Vol. 9495:
Three-Dimensional Imaging, Visualization, and Display 2015
Bahram Javidi; Jung-Young Son, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?