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Proceedings Paper

Laser beam divergence meter
Author(s): A. L. Etsina; Lev N. Butenko; Ilya Sh. Etsin
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Paper Abstract

The beam angular divergence meter with CCD camera intended for beam quality test of the excimer laser has been developed. Maximum diameter of laser beam under test is 110 mm. The resolution of the instrument corresponds to diffraction limits. Wavelength region is within the limits 200-1100 nm. Preliminary meter testing has been carried out using the commercial ILGI-503 repetitively pulsed nitrogen laser and the LGN-105 CW He-Ne laser. Performance of the instrument has been demonstrated to be satisfactory both for CW operation mode and pulse operation mode.

Paper Details

Date Published: 23 August 1995
PDF: 5 pages
Proc. SPIE 2619, International Conference on Atomic and Molecular Pulsed Laser, (23 August 1995); doi: 10.1117/12.216915
Show Author Affiliations
A. L. Etsina, State Research Ctr./Applied Chemistry (Russia)
Lev N. Butenko, S.I. Vavilov State Optical Institute (Russia)
Ilya Sh. Etsin, S.I. Vavilov State Optical Institute (Russia)

Published in SPIE Proceedings Vol. 2619:
International Conference on Atomic and Molecular Pulsed Laser
Victor F. Tarasenko; Georgy V. Mayer; Gueorgii G. Petrash, Editor(s)

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