In this paper further discussions on some new methods proposed in an earlier paper on phase stepping interferometry is detailed. These studies reveal that certain algorithms are more sensitive to miscalibration and nonlinearity and can be better candidates to detect the presence of phase shifter miscalibration or nonlinearity. A simplified approach to the understanding of the error and its reduction/elimination in phase shifting interferometry are also presented.

Date Published: 18 August 1995
PDF: 8 pages
Proc. SPIE 2622, Optical Engineering Midwest '95, (18 August 1995); doi: 10.1117/12.216847

Published in SPIE Proceedings Vol. 2622:
Optical Engineering Midwest '95
Rudolph P. Guzik, Editor(s)