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Proceedings Paper

Blazed diffraction gratings obtained by ion-milling sinusoidal photoresist gratings
Author(s): Christopher A. Palmer; Jeffrey L. Olson; Michael M. Dunn
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Paper Abstract

An alternative technique for blazing sinusoidal-profile gratings is discussed. Whereas conventional blazing techniques use an energetic ion beam to mill through a sinusoidal photoresist profile into a substrate, this technque creates the blazed profile in the photoresist itself, without milling into a substrate. Advantages to this technique are discussed, and grating efficiency curves and groove profiles are shown, before and after ion milling. Simulation results that predict the evolution of the groove profile under ion bombardment are also discussed.

Paper Details

Date Published: 18 August 1995
PDF: 10 pages
Proc. SPIE 2622, Optical Engineering Midwest '95, (18 August 1995); doi: 10.1117/12.216795
Show Author Affiliations
Christopher A. Palmer, Milton Roy Co. (United States)
Jeffrey L. Olson, Milton Roy Co. (United States)
Michael M. Dunn, Milton Roy Co. (United States)

Published in SPIE Proceedings Vol. 2622:
Optical Engineering Midwest '95
Rudolph P. Guzik, Editor(s)

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