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Proceedings Paper

Common path interferometer for flat surface measurement
Author(s): Katsuyuki Okada; Shigeki Kawabata; Toshio Honda
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Paper Abstract

In this paper, we propose a new common path interferometer, that needs only typical beam splitters to split and couple the reference and object beams. Some experiments show the common path configuration reduces the influence of vibration of the mirror effectively.

Paper Details

Date Published: 2 August 1995
PDF: 6 pages
Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); doi: 10.1117/12.215610
Show Author Affiliations
Katsuyuki Okada, Chiba Univ. (Japan)
Shigeki Kawabata, Chiba Univ. (Japan)
Toshio Honda, Chiba Univ. (Japan)

Published in SPIE Proceedings Vol. 2576:
International Conference on Optical Fabrication and Testing
Toshio Kasai, Editor(s)

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