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Proceedings Paper

Lateral and vertical dimension measurements by using laser scanning microscopy including an optical heterodyne function
Author(s): Hiroo Fujita
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Paper Abstract

A construction of surface profile measurement system for measuring lateral and vertical dimensions of submicron to micron size and its applications to industrial inspection are described. This system includes a laser scanning microscopy (LSM) and an optical heterodyne interferometry (OHI) functions in one and the same optical device. These two functions are used individually depending on the purpose of the measurement. OHI measures vertical dimensions, LSM measures lateral dimensions. The selection of the functions is performed by changing the intensity distribution of the probe light beam falled on a sample and signal processing system of the reflected light beam.

Paper Details

Date Published: 2 August 1995
PDF: 7 pages
Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); doi: 10.1117/12.215590
Show Author Affiliations
Hiroo Fujita, Citizen Watch Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 2576:
International Conference on Optical Fabrication and Testing
Toshio Kasai, Editor(s)

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