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Proceedings Paper

Measurement of refraction and absorption indices of thin polymer film on the transparent semiconductor substrate via FTIR spectrometry
Author(s): Polina G. Buyanovskaya
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Paper Abstract

The inverse problem of determination of the optical parameters of thin polymer film on the monocrystalline silicon wafer when experimental transmission spectra are used, is solved for the special case of low absorption. Solution is carried out with allowance for the light interference in the film and multiple reflections of light in the wafer. Our results show that dependence of absorption bands intensity on the film thickness is nonmonotonous, i.e. interference has an influence on the optical density of absorption bands in registered spectrum.

Paper Details

Date Published: 23 June 1995
PDF: 5 pages
Proc. SPIE 2208, Refractometry, (23 June 1995); doi: 10.1117/12.213187
Show Author Affiliations
Polina G. Buyanovskaya, Institute of Microelectronics (Russia)

Published in SPIE Proceedings Vol. 2208:
Maksymilian Pluta; Mariusz Szyjer, Editor(s)

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