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Proceedings Paper

Refractometry of weakly absorbing multilayers via reflectometry
Author(s): Emoeke Loerincz; Robert Klug
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Paper Abstract

Simple reflection techniques for optical parameter determination of isotropic or anisotropic multilayers on a lower refractive index substrate are presented here. In case of weak absorption in at least one of the layers characteristic minima appear in the angular dependence of the reflectivity by computer fit of which the layer refractive indices and thicknesses can be determined. In case of a monolayer the achieved accuracy is better than the third and fourth decimal in the real and imaginary part of the refraction index, respectively. The fit of bi-layers has lower accuracy, but has the advantage of refractive index determination of non-absorbing layer(s) in the presence of a weakly absorbing auxiliary layer. Comparison between measured refractive indices by reflectometric and optical waveguiding methods shows agreement within 0.001.

Paper Details

Date Published: 23 June 1995
PDF: 10 pages
Proc. SPIE 2208, Refractometry, (23 June 1995); doi: 10.1117/12.213186
Show Author Affiliations
Emoeke Loerincz, Technical Univ. of Budapest (Hungary)
Robert Klug, Technical Univ. of Budapest (Hungary)

Published in SPIE Proceedings Vol. 2208:
Maksymilian Pluta; Mariusz Szyjer, Editor(s)

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