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Proceedings Paper

Temperature dependence of refractive index as a basis for laser thermometry of semiconductor crystals
Author(s): Alexander N. Magunov
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Paper Abstract

The quantitative description of interferogram registered in heating of crystal which has a finite angle between two surfaces and irradiating of crystal with sounding laser beam is given. The possibility of continuous measurement in real time of crystal's temperature using imperfect interferogram is discussed.

Paper Details

Date Published: 23 June 1995
PDF: 5 pages
Proc. SPIE 2208, Refractometry, (23 June 1995); doi: 10.1117/12.213174
Show Author Affiliations
Alexander N. Magunov, Institute of Microelectronics (Russia)

Published in SPIE Proceedings Vol. 2208:
Maksymilian Pluta; Mariusz Szyjer, Editor(s)

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