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Proceedings Paper

High-speed mask EB graphical image browser
Author(s): Robert Veltman; Itsuji Ashida; Kunihiko Tsuboi
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Paper Abstract

With mask data processing becoming increasingly complex, there is a growing need for mask data verification. An EB graphical image browser was developed to support mask data verification and was designed to allow high speed visualization of large data volumes such as typically found in ULSI designs. The EB browser uses an intermediate format in order to support multiple EB data formats. The software implementation allows for portability between computer platforms commonly used in a CAD framework.

Paper Details

Date Published: 3 July 1995
PDF: 11 pages
Proc. SPIE 2512, Photomask and X-Ray Mask Technology II, (3 July 1995); doi: 10.1117/12.212791
Show Author Affiliations
Robert Veltman, Sony Corp. (Japan)
Itsuji Ashida, Sony Corp. (Japan)
Kunihiko Tsuboi, Sony Corp. (Japan)

Published in SPIE Proceedings Vol. 2512:
Photomask and X-Ray Mask Technology II
Hideo Yoshihara, Editor(s)

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