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Proceedings Paper

Comparison of rigorous methods for x-ray and XUV grating diffraction analysis
Author(s): Leonid I. Goray; Boris C. Chernov
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Paper Abstract

A comparison of various rigorous methods of analysis for soft x ray and XUV surface-relief gratings is presented. Example results for a wide range of groove width-to-groove-spacing ratios and angles of incidence are presented for lamellar gratings. Diffraction efficiencies for gold lamellar gratings obtained from the integral and the characteristic wave methods of analysis are compared with previously published numerical results. The accuracy, the convergence, and the stability of the numerical methods are discussed.

Paper Details

Date Published: 20 June 1995
PDF: 6 pages
Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); doi: 10.1117/12.212594
Show Author Affiliations
Leonid I. Goray, Integrate, Inc. (Russia)
Boris C. Chernov, State Univ. of Telecommunications (Russia)

Published in SPIE Proceedings Vol. 2515:
X-Ray and Extreme Ultraviolet Optics
Richard B. Hoover; Arthur B. C. Walker Jr., Editor(s)

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