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Proceedings Paper

Structural analysis of multilayered x-ray mirrors by x-ray diffraction
Author(s): Dong-Eon Kim; DongHo Cha
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Paper Abstract

Molibdenum-silicon multilayer structure as a soft x-ray mirror fabricated using a magnetron sputtering system has been studied through x-ray diffraction (XRD) of Cu K(alpha ) (1.54 angstrom) radiation. The angular positions, the relative intensities, the widths of Bragg primary and secondary peaks in XRD pattern are sensitive to structural parameters such as unit thickness (bi-layer thickness), thickness ratio of composite materials, diffusion lengths, and roughness. Effects of each structural parameter on XRD pattern have been investigated. The results show that the angular positions of Bragg primary peaks are sensitive to the bi-layer thickness, the pattern of secondary peaks is sensitive to the thickness ratio. It is also found that the major effect of interfacial diffusion is the reduction of the intensities of high-order Bragg primary peaks, and roughness is responsible for the broadening of the widths of Bragg primary peaks and the increase of the intensities of Bragg secondary maxima. Using the above results, we have analyzed experimental XRD data to draw the structural parameters of Molibdenum-silicon multilayer structure.

Paper Details

Date Published: 20 June 1995
PDF: 8 pages
Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); doi: 10.1117/12.212585
Show Author Affiliations
Dong-Eon Kim, Pohang Univ. of Science and Technology (South Korea)
DongHo Cha, Pohang Univ. of Science and Technology (South Korea)

Published in SPIE Proceedings Vol. 2515:
X-Ray and Extreme Ultraviolet Optics
Richard B. Hoover; Arthur B. C. Walker Jr., Editor(s)

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