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Proceedings Paper

Real-time monitoring of diamond-like film growth by x-ray diffraction
Author(s): Alexander M. Baranov; V. V. Sleptsov; Sergei A. Tereshin; Igor Fedorovich Mikhailov; V. I. Pinegin
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Paper Abstract

The first in-situ x-ray monitoring was applied for superthin (20-250 A) diamond-like carbon (DLC) films investigation. The film thickness, density, roughness, and growth rate were calculated from reflectivity measurements during deposition and etching processes. The objects of in-situ investigations were DLC films obtained by RF-method in C6H12+Ar and C6H12+N2 mixtures on silicon substrates. The results of an investigation reveal that the roughness and the density of DLC films were varied at early stages. It was shown that obtained results can be explained by island mechanism of DLC films growth. It was shown that in-situ x-ray monitoring system permits us to examine the ultra thin layers and also to carry out the diagnostic of transient processes as the deposition conditions changes.

Paper Details

Date Published: 15 June 1995
PDF: 8 pages
Proc. SPIE 2519, X-Ray and Ultraviolet Sensors and Applications, (15 June 1995); doi: 10.1117/12.211894
Show Author Affiliations
Alexander M. Baranov, Research Institute of Vacuum Technique (Russia)
V. V. Sleptsov, Research Institute of Vacuum Technique (Russia)
Sergei A. Tereshin, Research Institute of Vacuum Technique (Russia)
Igor Fedorovich Mikhailov, Kharkov State Polytechnic Univ. (Ukraine)
V. I. Pinegin, Kharkov State Polytechnic Univ. (Ukraine)

Published in SPIE Proceedings Vol. 2519:
X-Ray and Ultraviolet Sensors and Applications
Richard B. Hoover; Mark Bennett Williams, Editor(s)

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